Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11177067 | Magnetic shielding for plasma sources | Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson | 2021-11-16 | $735,910,000 |
| 11101107 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Henry Povolny, Anthony J. Ricci | 2021-08-24 | $241,318,000 |
| 10896808 | Maintenance mode power supply system | John Pease | 2021-01-19 | $197,136,000 |
| 10892179 | Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods | Henry Povolny, Anthony J. Ricci | 2021-01-12 | $398,325,000 |