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Matthew Busche

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #72,697 of 548,734Top 15%
3
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11204206 Thermal switch 2021-12-21
11041682 Thermal switch 2021-06-22
10892197 Edge seal configurations for a lower electrode assembly Keith Gaff, Anthony J. Ricci, Henry Povolny, Scott Stevenot 2021-01-12