Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158488 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2021-10-26 |
| 10916409 | Active control of radial etch uniformity | Alexei Marakhtanov, Felix Kozakevich, John Holland, Kenneth Lucchesi | 2021-02-09 |