Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158488 | High speed synchronization of plasma source/bias power delivery | Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry, Jonathan Smyka +5 more | 2021-10-26 |
| 11076477 | Cooling and compression clamp for short lead power devices | Ky Thoai Luu, Dave Coffta | 2021-07-27 |
| 11011940 | Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber | Ky Thoai Luu | 2021-05-18 |
| 10930470 | Pulsed, bidirectional radio frequency source/load | Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington, Amish Rughoonundon +2 more | 2021-02-23 |