John Daugherty — 7 Patents at Lam Research

Issued Patents 2021

Showing 1–7 of 7 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
11124659	Method to selectively pattern a surface for plasma resistant coat applications	Amir A. Yasseri, Duane Outka, Hong Shih	2021-09-21	$178,243,000
11112773	Systems for removing and replacing consumable parts from a semiconductor process module in situ	David Trussell, Alan J. Miller, Alex Paterson	2021-09-07	$360,735,000
11087961	Quartz component with protective coating	Lin Xu, Robin KOSHY, Satish SRINIVASAN, David Joseph WETZEL	2021-08-10	$172,238,000
11031215	Vacuum pump protection against deposition byproduct buildup	John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more	2021-06-08	$197,833,000
10967407	Conditioning chamber component	Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more	2021-04-06	$236,818,000
10964514	Electrode for plasma processing chamber	Evan E. Patton	2021-03-30	$460,773,000
10914003	Monolithic gas distribution manifold and various construction techniques and use cases therefor	Andrew C. Lee, Michael C. Kellogg, Christopher Pena	2021-02-09	$279,311,000