Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124659 | Method to selectively pattern a surface for plasma resistant coat applications | Amir A. Yasseri, Duane Outka, Hong Shih | 2021-09-21 |
| 11112773 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | David Trussell, Alan J. Miller, Alex Paterson | 2021-09-07 |
| 11087961 | Quartz component with protective coating | Lin Xu, Robin KOSHY, Satish SRINIVASAN, David Joseph WETZEL | 2021-08-10 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10967407 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2021-04-06 |
| 10964514 | Electrode for plasma processing chamber | Evan E. Patton | 2021-03-30 |
| 10914003 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, Christopher Pena | 2021-02-09 |