Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171021 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Richard A. Marsh, Saravanapriyan Sriraman | 2021-11-09 |
| 11112773 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | David Trussell, Alan J. Miller, John Daugherty | 2021-09-07 |
| 11049693 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Ying Wu | 2021-06-29 |
| 10950454 | Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method | Xiang Zhou, Tom A. Kamp, Yoshie Kimura, Duming Zhang, Chen Xu +1 more | 2021-03-16 |