Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171021 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Alex Paterson, Richard A. Marsh | 2021-11-09 |
| 10997345 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Yan Zhang +1 more | 2021-05-04 |