Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10997345 | Method of etch model calibration using optical scatterometry | Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman, Yan Zhang +1 more | 2021-05-04 |
| 10989652 | Systems and methods for combining optical metrology with mass metrology | Rajan Arora, Jason Shields | 2021-04-27 |