YZ

Yan Zhang

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #203,846 of 548,734Top 40%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
10997345 Method of etch model calibration using optical scatterometry Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman +1 more 2021-05-04