Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056322 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2021-07-06 |
| 11029668 | Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values | Marcus Musselman | 2021-06-08 |
| 11011353 | Systems and methods for performing edge ring characterization | Marcus Musselman, Jon McChesney | 2021-05-18 |
| 10997345 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Mehmet Derya Tetiker, Saravanapriyan Sriraman, Yan Zhang +1 more | 2021-05-04 |