Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011353 | Systems and methods for performing edge ring characterization | Marcus Musselman, Andrew D. Bailey, III | 2021-05-18 |
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Yuhou Wang, Michael J. Martin, Alexander Paterson | 2021-03-23 |