Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Michael J. Martin, Jon McChesney, Alexander Paterson | 2021-03-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Michael J. Martin, Jon McChesney, Alexander Paterson | 2021-03-23 |