Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Michael J. Martin, Jon McChesney, Alexander Paterson | 2021-03-23 | $164,801,000 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Michael J. Martin, Jon McChesney, Alexander Paterson | 2021-03-23 | $164,801,000 |