YW

Yuhou Wang

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #192,149 of 548,734Top 40%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
10957521 Image based plasma sheath profile detection on plasma processing tools Michael J. Martin, Jon McChesney, Alexander Paterson 2021-03-23