Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171021 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Alex Paterson, Richard A. Marsh, Saravanapriyan Sriraman | 2021-11-09 |
| 11062920 | Ion injector and lens system for ion beam milling | Ivan L. Berry, III | 2021-07-13 |
| 11056322 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee | 2021-07-06 |
| 10998167 | Ion beam etch without need for wafer tilt or rotation | Ivan L. Berry, III | 2021-05-04 |