Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171021 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Alex Paterson, Saravanapriyan Sriraman | 2021-11-09 |
RM
Richard A. Marsh
Overall (2021): #288,800 of 548,734Top 55%
1
Patents 2021