Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro +4 more | 2021-12-07 |
| 11062920 | Ion injector and lens system for ion beam milling | Thorsten Lill | 2021-07-13 |
| 10998167 | Ion beam etch without need for wafer tilt or rotation | Thorsten Lill | 2021-05-04 |