Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Christian Thomas Fischer +4 more | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Christian Thomas Fischer +4 more | 2021-12-07 |