RO

Rainer Obweger

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #293,782 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11195730 Method and apparatus for processing wafer-shaped articles Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more 2021-12-07