Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10950454 | Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method | Xiang Zhou, Yoshie Kimura, Duming Zhang, Chen Xu, John Drewery +1 more | 2021-03-16 |