Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049726 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2021-06-29 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10957561 | Gas delivery system | Yoshie Kimura, James H. Adams, Yoko Yamaguchi Adams, Tony Zemlock | 2021-03-23 |
| 10950454 | Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method | Xiang Zhou, Tom A. Kamp, Yoshie Kimura, Duming Zhang, Chen Xu +1 more | 2021-03-16 |
| 10943789 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2021-03-09 |