Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |