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Haoquan Yan

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #438,135 of 548,734Top 80%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11031215 Vacuum pump protection against deposition byproduct buildup John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more 2021-06-08