MT

Ming-Kuei Tseng

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #327,234 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11031215 Vacuum pump protection against deposition byproduct buildup John Drewery, Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan +1 more 2021-06-08