Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049726 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, John Drewery | 2021-06-29 |
| 10943789 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, John Drewery | 2021-03-09 |