Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049693 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2021-06-29 |
| 11049726 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Qing Xu, John Drewery | 2021-06-29 |
| 11011351 | Monoenergetic ion generation for controlled etch | Juline Shoeb, Alexander Paterson | 2021-05-18 |
| 10943789 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Qing Xu, John Drewery | 2021-03-09 |