Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067389 | Overlay metrology system and method | Yung-Ho Alex Chuang, John Fielden, Xuefeng Liu, Peilin Jiang | 2021-07-20 |
| 11011366 | Broadband ultraviolet illumination sources | Yung-Ho Alex Chuang, Edgardo Garcia-Berrios, John Fielden | 2021-05-18 |
| 10943760 | Electron gun and electron microscope | Yung-Ho Alex Chuang, Edgardo Garcia Berrios, John Fielden, Masayoshi Nagao | 2021-03-09 |
| 10921261 | Strontium tetraborate as optical coating material | Yung-Ho Alex Chuang, Elena Loginova, John Fielden | 2021-02-16 |