Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067389 | Overlay metrology system and method | Yung-Ho Alex Chuang, Yinying Xiao-Li, John Fielden, Xuefeng Liu | 2021-07-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067389 | Overlay metrology system and method | Yung-Ho Alex Chuang, Yinying Xiao-Li, John Fielden, Xuefeng Liu | 2021-07-20 |