YF

Yuehong Fu

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #196,039 of 548,734Top 40%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
10910195 Substrate support with improved process uniformity Fangli Hao, Zhigang Chen 2021-02-02