Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910195 | Substrate support with improved process uniformity | Yuehong Fu, Zhigang Chen | 2021-02-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910195 | Substrate support with improved process uniformity | Yuehong Fu, Zhigang Chen | 2021-02-02 |