Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11198939 | Recursive inject apparatus for improved distribution of gas | Aaron Miller | 2021-12-14 | $102,368,000 |
| 11189502 | Showerhead with interlaced gas feed and removal and methods of use | Shahid Rauf, James D. Carducci, Vladimir Knyazik, Anantha K. Subramani | 2021-11-30 | $50,552,000 |
| 11114284 | Plasma reactor with electrode array in ceiling | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Shahid Rauf | 2021-09-07 | $49,370,000 |
| 11081317 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Philip Allan Kraus | 2021-08-03 | $89,613,000 |
| 10903056 | Plasma source for rotating susceptor | Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand, Hanhong Chen | 2021-01-26 | $35,448,000 |