Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more | 2021-11-09 |
| 10903056 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Hanhong Chen | 2021-01-26 |