Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Kelvin Chan +1 more | 2021-04-20 |
| 10903056 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand | 2021-01-26 |