Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186909 | Methods of depositing low-K films | Bhaskar Jyoti Bhuyan | 2021-11-30 |
| 11164745 | Method of enhancing selective deposition by cross-linking of blocking molecules | Bhaskar Jyoti Bhuyan | 2021-11-02 |
| 11107674 | Methods for depositing silicon nitride | Lakmal C. Kalutarage, Praket P. Jha, Jingmei Liang | 2021-08-31 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 11028478 | Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors | Victor Nguyen, Ning Li, Mihaela Balseanu, Li-Qun Xia, David Thompson | 2021-06-08 |
| 11028480 | Methods of protecting metallic components against corrosion using chromium-containing thin films | Thomas Knisley, David Alexander BRITZ, David Thompson | 2021-06-08 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Lakmal C. Kalutarage, David Thompson, William J. Durand, Kelvin Chan, Hanhong Chen +1 more | 2021-04-20 |
| 10985014 | Methods for selective deposition on silicon-based dielectrics | Bhaskar Jyoti Bhuyan | 2021-04-20 |
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Bhaskar Jyoti Bhuyan | 2021-03-23 |
| 10943780 | Methods for ALD of metal oxides on metal surfaces | Bhaskar Jyoti Bhuyan, David Thompson, Li-Qun Xia | 2021-03-09 |
| 10892157 | Methods for depositing blocking layers on conductive surfaces | Bhaskar Jyoti Bhuyan, Wenyi Liu | 2021-01-12 |