Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186909 | Methods of depositing low-K films | Mark Saly | 2021-11-30 |
| 11164745 | Method of enhancing selective deposition by cross-linking of blocking molecules | Mark Saly | 2021-11-02 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Pramit Manna +2 more | 2021-06-08 |
| 10985014 | Methods for selective deposition on silicon-based dielectrics | Mark Saly | 2021-04-20 |
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Mark Saly | 2021-03-23 |
| 10943780 | Methods for ALD of metal oxides on metal surfaces | Mark Saly, David Thompson, Li-Qun Xia | 2021-03-09 |
| 10892157 | Methods for depositing blocking layers on conductive surfaces | Mark Saly, Wenyi Liu | 2021-01-12 |