Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164753 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Steven Marcus | 2021-11-02 |
| 11158489 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2021-10-26 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno, Mario David Silvetti +4 more | 2021-08-03 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 10908104 | Radiation analysis apparatus | Satoshi Nakayama, Atsushi Nagata, Kazuo Chinone | 2021-02-02 |
| 10896858 | Processing apparatus and processing method | — | 2021-01-19 |