Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158489 | Methods and systems to modulate film stress | John C. Forster, Ran Liu, Kenichi Ohno, Ning Li, Mihaela Balseanu +2 more | 2021-10-26 |
| 11151431 | Printer and computer-readable medium storing computer-readable instructions | — | 2021-10-19 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Dmitry A. Dzilno, Mario David Silvetti +4 more | 2021-08-03 |