Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-station chamber lid with precise temperature and flow control

Multi-station chamber lid with precise temperature and flow control

US Patent 11098404 · Granted Aug 24, 2021

Estimated economic value: $92,770,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Atomic layer deposition coating system for inner walls of gas lines2025
Gas distribution plate2025
Gas distribution plate2025
Gas distribution plate2025
Gas distribution plate2025
Methods of operating a spatial deposition tool2025
Methods of operating a spatial deposition tool2025
Atomic layer deposition coatings for high temperature ceramic components2025
Dual channel showerhead assembly2025
Plasma showerhead assembly and method of reducing defects2025
Mainframe of dual-robot substrate processing system2025
Plasma chamber with multiphase rotating independent gas cross-flow with reduced 2025