Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |