Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198937 | Atomic layer deposition of protective coatings for semiconductor process chamber components | David Fenwick | 2021-12-14 |
| 11198936 | Atomic layer deposition of protective coatings for semiconductor process chamber components | David Fenwick | 2021-12-14 |
| 11180847 | Atomic layer deposition coatings for high temperature ceramic components | Xiaowei Wu, Michael R. Rice | 2021-11-23 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more | 2021-09-28 |
| 11053581 | Plasma erosion resistant rare-earth oxide based thin film coatings | Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho | 2021-07-06 |
| 11014853 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | David Fenwick | 2021-05-25 |
| 11008653 | Multi-layer coating with diffusion barrier layer and erosion resistant layer | David Fenwick, Xiaowei Wu | 2021-05-18 |
| 10934216 | Rare-earth oxide based chamber material | Biraja P. Kanungo | 2021-03-02 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2021-02-23 |
| 10899892 | Copolymerized high temperature bonding component | Sumanth Banda | 2021-01-26 |