Jennifer Y. Sun — 10 Patents at Applied Materials

Issued Patents 2021

Showing 1–10 of 10 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
11198937	Atomic layer deposition of protective coatings for semiconductor process chamber components	David Fenwick	2021-12-14	$102,368,000
11198936	Atomic layer deposition of protective coatings for semiconductor process chamber components	David Fenwick	2021-12-14	$102,368,000
11180847	Atomic layer deposition coatings for high temperature ceramic components	Xiaowei Wu, Michael R. Rice	2021-11-23	$124,354,000
11130142	Showerhead having a detachable gas distribution plate	Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more	2021-09-28	$64,178,000
11053581	Plasma erosion resistant rare-earth oxide based thin film coatings	Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho	2021-07-06	$60,527,000
11014853	Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments	David Fenwick	2021-05-25	$67,143,000
11008653	Multi-layer coating with diffusion barrier layer and erosion resistant layer	David Fenwick, Xiaowei Wu	2021-05-18	$51,490,000
10934216	Rare-earth oxide based chamber material	Biraja P. Kanungo	2021-03-02	$62,769,000
10930526	Rare-earth oxide based coatings based on ion assisted deposition	Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang	2021-02-23	$34,793,000
10899892	Copolymerized high temperature bonding component	Sumanth Banda	2021-01-26	$35,448,000