| 11198937 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
David Fenwick |
2021-12-14 |
| 11198936 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
David Fenwick |
2021-12-14 |
| 11180847 |
Atomic layer deposition coatings for high temperature ceramic components |
Xiaowei Wu, Michael R. Rice |
2021-11-23 |
| 11130142 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more |
2021-09-28 |
| 11053581 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho |
2021-07-06 |
| 11014853 |
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments |
David Fenwick |
2021-05-25 |
| 11008653 |
Multi-layer coating with diffusion barrier layer and erosion resistant layer |
David Fenwick, Xiaowei Wu |
2021-05-18 |
| 10934216 |
Rare-earth oxide based chamber material |
Biraja P. Kanungo |
2021-03-02 |
| 10930526 |
Rare-earth oxide based coatings based on ion assisted deposition |
Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang |
2021-02-23 |
| 10899892 |
Copolymerized high temperature bonding component |
Sumanth Banda |
2021-01-26 |
