| 11189517 |
RF electrostatic chuck filter circuit |
Edward Haywood, Adam J. Fischbach, Timothy Joseph Franklin |
2021-11-30 |
| 11130142 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Jennifer Y. Sun +1 more |
2021-09-28 |
| 11065680 |
Mesh for wear resistance in components and components including the wear resistant mesh |
Ignacio Martinez |
2021-07-20 |
| 11043361 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2021-06-22 |
| 10950477 |
Ceramic heater and esc with enhanced wafer edge performance |
Xing Lin, Jianhua Zhou, Jian J. Chen, Juan Carlos Rocha-Alvarez |
2021-03-16 |
| 10941779 |
Abrasion resistant inserts in centrifugal well pump stages |
Ignacio Alonso Martinez |
2021-03-09 |
| 10930475 |
Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films |
Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Amit Kumar BANSAL |
2021-02-23 |
| 10923334 |
Selective deposition of hardmask |
Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Sarah Michelle Bobek, Abdul Aziz Khaja +4 more |
2021-02-16 |
