Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053591 | Multi-port gas injection system and reactor system including same | Mingyang Ma, Junwei Su, Alexandros T. Demos, Sam Yong Kim, Gregory Bartlett | 2021-07-06 |
| 10971389 | Multi-zone pedestal for plasma processing | Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2021-04-06 |
| 10950477 | Ceramic heater and esc with enhanced wafer edge performance | Jianhua Zhou, Zheng John Ye, Jian J. Chen, Juan Carlos Rocha-Alvarez | 2021-03-16 |