Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101719 | Method and apparatus for determining motor temperature, and storage medium | Xiaohui Li, Fei Xiong, Linpei Zhu, Xiong Liu, Jin Shang | 2021-08-24 |
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2021-04-06 |