Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2021-04-06 |