Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189517 | RF electrostatic chuck filter circuit | Zheng John Ye, Adam J. Fischbach, Timothy Joseph Franklin | 2021-11-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189517 | RF electrostatic chuck filter circuit | Zheng John Ye, Adam J. Fischbach, Timothy Joseph Franklin | 2021-11-30 |