Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189517 | RF electrostatic chuck filter circuit | Zheng John Ye, Edward Haywood, Timothy Joseph Franklin | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189517 | RF electrostatic chuck filter circuit | Zheng John Ye, Edward Haywood, Timothy Joseph Franklin | 2021-11-30 |