Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Karthik Thimmavajjula Narasimha +12 more | 2021-06-08 |
| 10971364 | Ultra-high modulus and etch selectivity boron carbon hardmask films | Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2021-04-06 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2021-03-16 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Ziqing Duan, Abdul Aziz Khaja, Zheng John Ye, Amit Kumar BANSAL | 2021-02-23 |
| 10923334 | Selective deposition of hardmask | Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Sarah Michelle Bobek +4 more | 2021-02-16 |