Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037851 | Nitrogen-rich silicon nitride films for thin film transistors | Rodney Shunleong Lim, Jung Bae Kim, Yi Cui, Dong-Kil Yim, Soo Young Choi | 2021-06-15 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2021-03-16 |