Issued Patents 2021
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Chawon Koh, Sunghyun Park +2 more | 2021-11-30 |
| 11145683 | Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices | Xiangxin Rui, Lai ZHAO, Jrjyan Jerry CHEN, Yujia Zhai | 2021-10-12 |
| 11123837 | Method of removal of sharp corners from diffuser plate | Ilyoung Richard Hong, Lai ZHAO, Jianhua Zhou, Robin L. Tiner, Gaku Furuta +1 more | 2021-09-21 |
| 11101338 | Thin film transistor with small storage capacitor with metal oxide switch | Jung Bae Kim, Dong-Kil Yim, Lai ZHAO | 2021-08-24 |
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE +1 more | 2021-08-17 |
| 11049887 | Layer stack for display applications | Xiangxin Rui, Shinichi Kurita, Yujia Zhai, Lai ZHAO | 2021-06-29 |
| 11037851 | Nitrogen-rich silicon nitride films for thin film transistors | Rodney Shunleong Lim, Jung Bae Kim, Jiarui Wang, Yi Cui, Dong-Kil Yim | 2021-06-15 |
| 10995165 | Catalyst composition for preparing conjugated diene-based polymer and conjugated diene-based polymer prepared using the same | Suk Youn Kang, Woo Jin Cho, Suk Joon Yoo, Jeong Heon Ahn, Jin Sook Ryu | 2021-05-04 |
| 10991916 | Thin-film encapsulation | Tae Kyung Won, Sanjay Yadav | 2021-04-27 |
| 10982026 | Method of preparing conjugated diene-based polymer by continuous polymerization | Suk Joon Yoo, Sung Ho Park, Jeong Heon Ahn | 2021-04-20 |
| 10927461 | Gas diffuser support structure for reduced particle generation | Allen Lau, Robin L. Tiner, Lai ZHAO | 2021-02-23 |
| 10923327 | Chamber liner | Jianheng Li, Lai ZHAO, Robin L. Tiner, Allen Lau, Gaku Furuta | 2021-02-16 |