Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Yong-Jhin Cho, Chawon Koh, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2021-04-27 |