Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Chawon Koh, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |