Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |