Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |